Used BROOKS AUTOMATION Guardian #9018585 for sale
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ID: 9018585
Reticle indexer, Asyst, INXR150
Integrated SMIF port and cassette indexer
Designed to mount directly to process tool.
BROOKS AUTOMATION Guardian is an advanced wafer handler for use in sensitive semiconductor facilities. It is engineered for the handling and storage of up to six standard 25mm or 50mm wafers with insert diameters of 300 or 460mm. Guardian was designed to offer maximum protection of the sensitive wafers, while increasing throughput. BROOKS AUTOMATION Guardian includes a variety of features that protect the integrity of the wafers. The wafers are environmentally sealed to prevent dust contamination and a variety of sensors detect any changes in wafer position or temperature, alerting operators of possible danger. Enhanced levels of isolation from the outside environment help to reduce electrostatic charge. An external power supply further prevents any possible surges that could damage components. The flexibility of the equipment allows for both automatic and manual operation of the Handler. It is equipped with a semi-automated recipe-based platform that simplifies wafer exchange and delivery. Guardian has the ability to accommodate various wafer sizes and process temperatures, allowing for a variety of processes to be run. In terms of performance, BROOKS AUTOMATION Guardian is powered by a fast, precise motion control system that offers motion speeds of up to 24 axes per second, reducing wafer transit times and increasing throughput. The control unit is connected with advanced vision camera and scanning systems, allowing for the measurement of wafer topographies, which helps to verify the correct processing of individual wafers. Overall, Guardian is an ideal choice for customers looking for a new wafer handler that can handle sensitive wafers and serve a variety of industries. This wafer handler offers reliable protection and enhanced speeds for wafer delivery and exchange, as well as the flexibility to work with different wafer sizes and process temperatures. The advanced motion control machine and camera and scanning systems help provide secure wafer handling and verification of processing.
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