Used BROOKS AUTOMATION Guardian #9018586 for sale
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ID: 9018586
Assy, base, Guardian BRS aluminum
Used with Guardian bare reticle stocker.
BROOKS AUTOMATION Guardian is a semi-automated wafer handler designed for use in a wide variety of semiconductor fabrication applications. Guardian is capable of handling almost any size or shape of wafer, from small die slices to large pieces, and is designed to operate with maximum efficiency and accuracy. BROOKS AUTOMATION Guardian features a high-aid wafer intercept system, which utilizes a proven mechanical tray loader and automated feeder robot to ensure accurate placement and secure handling of wafers into and out of the tool. It also offers a wide range of wafer handling capabilities including transfer of wafer slices and wafers between process tools, output of wafer cassettes and frames, input and output of wafer slices from wafer disks and boat carriers, and input and output of containers containing multiple slices at the same time. In addition to its wafer handling capabilities, Guardian also offers reliable and repeatable operation for high-volume wafer slicing applications. Its advanced motion control algorithms enable secure and accurate positioning and slicing of wafers, as well as reliable automated loading and unloading of wafer containers. To further enhance its capabilities, BROOKS AUTOMATION Guardian includes a variety of customizable software options, including a recipe editor, process monitor, inspection functions, and support for external recipes. It also features an easy-to-use operator control interface, helping to streamline wafer handling processes. Overall, Guardian is a reliable and efficient wafer handler designed for use in a variety of semiconductor fabrication applications. Its robust features and automated capabilities make it an ideal solution for high-volume manufacturing operations.
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