Used BROOKS AUTOMATION / JENOPTIK Ergospeed II #293806330 for sale

BROOKS AUTOMATION / JENOPTIK Ergospeed II is a versatile, autonomous single-wafer handler designed for high-throughput processing of device, test, and production wafer diameters up to and including 200mm, with a maximum of eleven inches (280mm) of diameter overhang. Through the Ergospeed's repositioning accuracy, wafers can be placed on the same marks and certified for accuracy within ±500 microns, with precision under ±50 microns and repeatability up to 150 microns. This allows for the easy and repeatable placement of die on and off the wafer that can be customized for various applications. Furthermore, JENOPTIK Ergospeed II's flexibility enables it to be integrated with a variety of tools and processes, and can handle up to three tools simultaneously. BROOKS AUTOMATION Ergospeed II is a highly reliable wafer handler that offers the following features: Process speed of 36 wafers per hour with 300mm wafers, and 100 wafers per hour with 200mm wafers Ability to handle wafers up to 11" (280mm) in diameter Patented heated chuck technology, internal temperature adjustable up to 70 degrees Celsius Temperature accuracy of ±2 degrees Celsius High-speed electrostatic chuck that can parallel clamp with up to 12 Newtons of force The option of a manual surface cleaning system Specialty end effectors options for custom solutions Broader range of products, including flat wafers, through-hole wafers, and wafer substrates of various materials Ergospeed II is also equipped with automatic process monitoring and optimization features. This wafer handler's maximum positional accuracy and repeatability, when combined with its automatic process monitoring and optimization features, makes it suitable for a variety of chip manufacturing, test, and package assembly applications. Additionally, its low maintenance requirements, including no need for re-calibration or special tools, ensures users of this wafer handler have optimum repeatable results, faster processing times, and improved yield rates. Overall, BROOKS AUTOMATION / JENOPTIK Ergospeed II is a highly reliable and versatile wafer handler that can be well-integrated into a variety of applications. With its high-speed and accuracy, its adjustable temperatures, reliable surface cleaning system and its calibration-free performance, users get a great solution that can significantly increase process speed and yield rates.