Used BROOKS AUTOMATION / JENOPTIK Ergospeed II #9093060 for sale
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ID: 9093060
Vintage: 1998
SMIF Systems
(1) SLR 200 LPTSL/L
(1) SLR 200 LPTSL/R
115 VAC
60 Hz
250 W
Missing parts: (1) Gripper box
1998 vintage.
BROOKS AUTOMATION / JENOPTIK Ergospeed II is a high-performance wafer handler designed for both single-side and double-side substrate applications. It offers a variety of features designed to improve efficiency and safety, achieving the best possible throughput rates. Its motorized substrate translation equipment uses precision-controlled motors that enable the use of faster and more dynamic movement compared to manual systems. It also incorporates optimized strategies to reduce dead-times, minimizing cycle times. JENOPTIK Ergospeed II offers high throughput speeds with no downtime due to all-mechanical design. Its advanced servo drives combined with brushless motors enable the most efficient and precise movements while the 8 zone external positional sensing augmented with the internal electronic system ensures smooth and precise motion control. BROOKS AUTOMATION Ergospeed II is equipped with an advanced dual load port unit with double gripping electrodes that provide the highest level of accuracy and reliability. The dual-head robot is equipped with two spindle heads that can be independently controlled to ensure precise substrate picking and placement. Ergospeed II has an integrated robotic safety machine, providing access to all safety components, interlocks and interlock matrices from the control tool environment. It also includes an auto-calibration asset that automatically calibrates all wafer load positions and a vision model that assists with alignment and finding inaccuracies. BROOKS AUTOMATION / JENOPTIK Ergospeed II is designed to be user-friendly and intuitive to operate. Its user-friendly interface and graphical representation makes it easy to monitor and control substrate handling as well as track the status of wafers throughout the equipment. It also features exclusive workflows for operations such as substrate loading, receptacle to processing area transfers, and hatch and stall opening. Overall, JENOPTIK Ergospeed II is an excellent choice for high-precision, high-throughput wafer handling. Its combination of advanced robotic systems, safety systems, calibration system and intuitive user-friendly interface make it an excellent choice for any lab or production facility. Its accuracy and reliability make it a cost effective solution for all wafer handling needs.
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