Used BROOKS AUTOMATION / JENOPTIK Ergospeed II #9134142 for sale
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ID: 9134142
Vintage: 2000
Systems
LPTSM/R (right)
Includes:
SLR 200 LPTSM/L and R
2000 vintage.
BROOKS AUTOMATION / JENOPTIK Ergospeed II wafer handler is an especially efficient front-end automated wafer-handling equipment. This high-end tool, which is designed to transfer wafers into and out of individual workflows, plays a key role in enabling efficient semiconductor fabrication. JENOPTIK Ergospeed II integrates several features and capabilities to make it an ideal solution for today's fast-paced semiconductor processes. The system offers a flexible and robust architecture, allowing for a wide range of applications. First, the unit is equipped with a primary shuttle assembly that can handle up to fifteen wafers at once, thus increasing throughput speeds. At the same time, a secondary shuttle machine is installed which is able to automatically transfer wafers from one pocket to another. Another key feature of the tool is its intelligent motion control. This ensures that all wafers are accurately positioned in the use area for optimal processing. This is especially useful for processes that require multiple wafer passes. The motion control asset is also supported by unique vision tracking systems, which help to ensure accurate wafer placement on the work surface. BROOKS AUTOMATION Ergospeed II also integrates advanced safety features to ensure a secure work environment. It includes a dual-wall safety model, along with several other ancillary safety devices. This helps to ensure that there are no potential hazards which could damage both the wafers and the valuable process equipment. Ergospeed II is an attractive solution for any semiconductor factory that is looking for a reliable and efficient wafer handling equipment. It offers high throughput rates, robust construction, and a long-term quality assurance. In addition, the system is easily integrated with other processes and tools, meaning it can easily become a key component in today's semiconductor production lines.
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