Used BROOKS AUTOMATION / JENOPTIK Ergospeed II #9280738 for sale

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BROOKS AUTOMATION / JENOPTIK Ergospeed II
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ID: 9280738
SMIF Loading system SLR 200 LPTSM/R.
BROOKS AUTOMATION / JENOPTIK Ergospeed II is an automated wafer handler used in semiconductor wafer processing. The system is designed to facilitate the loading, unloading, and transport of wafers between various semiconductor wafer-processing tools. JENOPTIK Ergospeed II is designed to minimize operator intervention, eliminating much of the manual labor required in previous wafer-handling systems. BROOKS AUTOMATION Ergospeed II employs a proprietary positional actuator which works in tandem with a computer-controlled wafer stage. This combination allows the handler to move wafers accurately and precisely while devoid of external interference. Ergospeed II can interface with various types of wafer-processing tools, including sorters, saws, grinders, polishers, spin coaters, and photodetectors. BROOKS AUTOMATION / JENOPTIK Ergospeed II features a wafer magazine and a storage tray, enabling the handler to simultaneously perform Loading, Unloading, and Wafer-Transport operations. It is also equipped with a wafer alignment mechanism, which uses a laser imaging system to ensure wafers have been properly positioned, preventing contact between wafer surface area and the handler's internal components. JENOPTIK Ergospeed II can process up to 200 wafers in a single operation, further reducing processing time. It is also capable of operating under confined working spaces, making it suitable even for laboratories with limited floor space. Additionally, its modular design lowers the costs associated with maintenance and repair, allowing users to quickly access and replace certain parts of the handler while leaving other components untouched. Overall, BROOKS AUTOMATION Ergospeed II is a finely engineered automated wafer handler, delivering precise movements and reliable operation. This system reduces processing time, improves safety, and is ideal for laboratories with limited floor space and resources.
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