Used BROOKS AUTOMATION / JENOPTIK Ergospeed II #9280881 for sale

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BROOKS AUTOMATION / JENOPTIK Ergospeed II
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ID: 9280881
SMIF System SLR 200 LPTSL/R.
BROOKS AUTOMATION / JENOPTIK Ergospeed II wafer handler is a high-performance, robotic delivery equipment designed for automated production of 200mm and 300mm semiconductor wafers. This robotic arm is used in wafer processing, such as lithography, etching, diffusion, and polishing, as well as for wafer transfer and wafer transport between different production and testing stages. The robot operation is easy to control through a graphical user interface (GUI) with touch-screen displays. The ergonomic design of the handler makes the handling of the wafers safe and efficient, while ensuring a high-quality end product. The handler comes equipped with advanced safety features such as internal light barriers, emergency stop buttons, and an interlock mechanism for extra protection. It also has an integrated dual clutch system which smoothly transitions between forward/backward movements, and a patented dual joint-drive unit which allows the robot arm to move in all directions with high accuracy. The design is further complemented with a fully-automatic wafer transfer machine that eliminates manual loading/unloading processes, allowing automation of large wafer production steps. JENOPTIK Ergospeed II wafer handler runs on a motor-driven spindle which is equipped with a high-torque torque motor and encoder feedback. This ensures a high-precision operation while allowing a fast wafer rotation speed. An advanced vacuum suck-up mechanism securely holds and transfers the wafers without damage, while several sensors monitor the vacuum pressure, ensuring a failsafe and consistent pickup. The robot also features a variety of maintenance indicators that ensure the correct use of the handler. An audible alarm will sound at regular intervals, alerting operatives to inspect and adjust all safety and control features. A maintenance reminder is also available which can be customised to specify when and when to carry maintenance on the robot. BROOKS AUTOMATION Ergospeed II wafer handler is a powerful robotic arm that provides a reliable, high-quality solution for wafer processing and transfer in automated production lines.
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