Used BROOKS AUTOMATION / JENOPTIK Ergospeed LPTS/L #9032628 for sale

JENOPTIK Ergospeed LPTS/L Wafer Handler is an ergonomically designed and user-friendly wafer handling equipment for semiconductor processing. It is one of the most reliable and robust wafer handlers on the market today, designed to meet customer needs for process compatibility, robustness, and risk mitigation. The LPTS/L provides an extremely low-profile wafer handling system and features a compact design for floor or tabletop mounting. It is equipped with BROOKS AUTOMATION patented Ultra-Chloride free surface protection technology, allowing it to reliably handle 20" and 25" csp wafers, up to 8 inches in diameter and 7.5 microns thick. The unit features quiet operations of less than 72dBa, making it ideal for cleanroom environments. The LPTS/L is constructed of aluminum and stainless steel, and can be mounted on any cleanroom table or floor. The LPTS/L offers unparalleled accuracy and repeatability with a Wafer-to-Wafer speed of 0.02 second and a Wafer-to-Cup speed of 0.1 second, making it ideal for high volume applications. It has a total lift capacity of 500 gram, and an optional 'Proof Load' feature ensures the correct wafers and covers are loaded. The machine also features automatic wafer cassette recognition, wafer excursia detection and correction, and automatic prober site verification. The LPTS/L is easily integrated into existing automation systems, with a standard serial interface and an optional automated wafer tracking tool that tracks wafer locations to ensure efficient handling. Furthermore, customer specific process systems can be implemented from the provision of special software modules. Overall, BROOKS AUTOMATION / JENOPTIK Ergospeed LPTS/L Wafer Handler is an impressive example of modern wafer handling equipment. Low profile design, low noise operations, and exceptional accuracy and repeatability make it an ideal choice for semiconductor processing applications. Additionally, a user-friendly operating asset, integrated automation, and customer specific software modules make it a versatile solution for the highest grade wafer handling needs.