Used BROOKS AUTOMATION / JENOPTIK Ergospeed LPTS/R #9032627 for sale

JENOPTIK Ergospeed LPTS/R wafer handler is designed for use in semiconductor processing and wafer fabrication. This wafer handler is an all-in-one solution that provides a comprehensive set of features designed to meet the growing needs of today's technologically advanced semiconductor manufacturers. The LPTS/R offers users precise wafer transfer, and accurate alignment processes in a lightweight design. BROOKS AUTOMATION Ergospeed LPTS/R wafer handler is designed with an advanced lift and panel aligner equipment. The lift and aligner system consists of two separate components—the Lift Station and the Alignment Station. The Lift Station actively lifts the wafer off its base to ensure accurate and repeatable placement during transfer to the Alignment Station. There, the Alignment Station precisely aligns the wafer in order to ensure a perfect panel transfer. The Ergospeed LPTS/R supports a wide variety of substrate sizes and shapes, including ring cassettes, hexagonal, rectangular, and square substrates. It also offers load ports with closing mechanisms that can be configured for either manual or automated operation. Additionally, each port is equipped with an LED indicator for visual identification of loading states, as well as load lock sensors for accurate detection of failures or damage. The LPTS/R wafer handler is designed with several additional features that improve its performance and usability. Its Lift Motor Plate consists of 16 independent, brushless motors to allow for larger through-put loading and shorter cycle times. The Lift Loop Structure helps the handler maintain a lift height of 300mm. This design element also works to reduce the power consumption of the equipment. In addition, the handler enjoys a modular unit architecture that enables it to easily exchange parts or components. This ensures that user maintenance is kept to a minimum and that the machine as a whole runs at peak efficiency. Finally, the Ergospeed LPTS/R is designed with advanced safety mechanisms to protect users and equipment. Its two-point mechanical limit switch helps protect both the lift and panel aligner, while ESD protection inhibits static buildup. In case of an emergency, the tool also features an emergency stop, dual interlock systems, and a power fail alarm. BROOKS AUTOMATION / JENOPTIK Ergospeed LPTS/R wafer handler is the ideal solution for users who are looking for precise wafer transfer, accurate alignment processes, and reliable safety mechanisms. This all-in-one solution provides users the features necessary to meet the demands of the fast-paced semiconductor industry.