Used BROOKS AUTOMATION / JENOPTIK Vision #9411478 for sale
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BROOKS AUTOMATION / JENOPTIK Vision is a highly advanced wafer-handling robot designed for semi-automated and fully automated processes. It is capable of transferring various wafer sizes from a central cassette to robotic delivery trucks, lasers, batch loaders, etchers and other machines in a semiconductor production line. This robot has been designed to provide exceptionally precise movements and reliably deliver wafers with a minimum of overhead. JENOPTIK Vision employs an advanced BROOKS AUTOMATION Vision system to identify and track wafer location and size while its robotic arm picks, delivers and places wafers with a repeatability accuracy of +/- 2.3 micron and an accuracy of 0.12 micron. The two-axis turntable has 4000 RPM and tilt range of plus or minus 30 degrees. The diagonal movement of the arm is powered by a DC motor, allowing for quick and precise movement over large distances. Additionally, the robotic arm is capable of carrying 34 kg, which ensures that a high throughput of wafers can be handled. Vision also has multiple safety features designed to ensure that wafer handling is performed safely. These include safety-rated EPS-certified interlocks that disable the robot when the guard is open, as well as torque sensors and overload protection for the motors. Additionally, the robot can be integrated into an automated production line easily, as it is designed with a standard RS-232 connection for communicating with other elements on the production line. BROOKS AUTOMATION / JENOPTIK Vision is also able to be programmed to be integrated directly into a customer's programmable logic controller without any additional software. JENOPTIK Vision is a powerful, precise and highly accurate tool for handling and transferring wafers in order to streamline the production process. Its array of features, including BROOKS AUTOMATION Vision system, robotic arm, torque sensors, overload protection and safety systems, guarantee reliable and safe delivery of wafers and a smooth, efficient operation.
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