Used BROOKS AUTOMATION / JENOPTIK Vision #9411479 for sale
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BROOKS AUTOMATION / JENOPTIK Vision is a robust industrial grade robotic wafer handler designed for the handling of semiconductor wafers inside a wafer fabrication facility. It is comprised of various robotic subsystems that are integrated together to provide a complete wafer handling system for the transfer of wafers between processing modules and stages. JENOPTIK Vision robot manipulator is designed to handle a variety of wafers. It is equipped with a four-axis robot arm that can grasp and orient wafers for transport within the wafer fabrication facility. The robot is equipped with BROOKS AUTOMATION Vision-based navigation and navigation markers on the floor to ensure accurate wafer placement. The position of the wafer is monitored using a vacuum feed-through chamber that can detect and control the relative position of the wafer. The robotic arm is driven by high-precision servo motors that provide accurate and fast motion control. The robot also has an integrated safety system which is able to detect and stop any potential accidents in the system. Vision also has integrated wafer clean and pre-cleaning station which is equipped with a spin dryer and a high-pressure washer for cleaning the wafers. The robot is also equipped with a mission planner and is capable of running multiple wafer handling programs simultaneously. In addition, BROOKS AUTOMATION / JENOPTIK Vision robot is also capable of real-time monitoring of the wafer and can detect obstacles, stop and monitor the safety condition with the help of onboard sensors and cameras to detect any accidents. Its built-in software feature can control motion, program, and coordinate tasks between different robots, and automatically manages position, velocity, and program sequence. JENOPTIK Vision also provides communications and data interfaces for connecting with other processing equipment. It is an efficient and precise wafer handler that offers flexibility, high speed, and accuracy for transferring wafers and provide a reliable and integrated automation solution for wafer fabrication facilities.
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