Used BROOKS AUTOMATION Lot of (2) Robots #293621700 for sale
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BROOKS AUTOMATION 195402 is a wafer handler equipped with a motorized gantry to carry out a variety of wafer handling tasks. The wafer handler is designed to manipulate wafers and create uniform wafer spacing in cases where wafer-to-wafer contact is necessary. It is capable of up to four-axis motion and automated operations. The 196402 is a fully-automated device that is capable of transferring and aligning wafers with a high degree of accuracy, without an external operator. Wafers are loaded and unloaded via an input/output port, and held securely with vacuum suction. The vacuum-guided robot arm then moves the wafer using motorized gantry into the desired destination. Motion axes are individually adjustable and the wafer orientation is adaptable. 195402 is capable of supporting various wafer sizes and substrates, from 200mm to 300mm in diameter. It is also designed to support small and large substrates as well as both complex and simple shapes. The micro-fine accuracy of the robotic arm and the small feature size of the handler make it suitable for precision applications. For example, the 196402 can be used for wafer flipping and positioning, as well as complex wafer transfers between chambers and systems. The wafer handler is potentiallly compatible with existing systems, and is equipped with a host of communication protocols. It can be operated as a stand-alone system, or integrated as part of a larger automation network. The automated operation also allows for rapid and concurrent operations, resulting in increased throughput. BROOKS AUTOMATION 195402 wafer handler is an efficient and reliable device that is adjustable and flexible. It allows advanced levels of automation to be integrated in a range of systems and processes. Its versatile design and micro-fine accuracy ensure its suitability for a variety of wafer handling needs.
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