Used BROOKS AUTOMATION MTX 2000 #293600562 for sale

ID: 293600562
Wafer Size: 12"
Vintage: 2003
Wafer sorter, 12" 2003 vintage.
BROOKS AUTOMATION MTX 2000 is a premier robotic wafer handler that offers superior productivity and performance to meet the demanding needs of today's semiconductor processing environment. MTX 2000 is designed to handle medium to large diameter wafer diameters with minimum downtime, ensuring optimum yield and maximum cost savings for the user. BROOKS AUTOMATION MTX 2000 is an advanced, high speed wafer handling equipment with redundant axes along with an onboard diagnostic and programming system. The top-loader design allows for fast, accurate loading and unloading of wafer carriers. It also allows for flexible exchange of parts between the load ports for quick setup changes. The advanced robotic actuator, linear motor drive and smarter software control unit provide virtually no-downtime wafer handling. The machine consists of three subsystems: a wafer motion subsystem, a wafer buffering subsystem, and a wafer transfer subsystem. The wafer motion subsystem moves wafers along the X, Y and Z axes. The wafer buffering subsystem stores a priority list of wafers based on their desired order of transfer. The wafer transfer subsystem shuttles wafers horizontally between delivery and response sites. MTX 2000 is designed to precisely thread, de-thread, align, broker, transfer and retap wafers that are of various sizes and weight. It also quickly locates and indexes the wafers in the same order as they entered the tool. The asset is equipped with Anti-Pattern, Interlock and Estop capabilities, which are essential for safety and security. BROOKS AUTOMATION MTX 2000 also allows for reduction in particulate generation with its advanced filtration model. Brooks's Automation MTX 2000 is a reliable wafer handler that can be customized to meet the specific needs of the user. It is the optimal solution for ultra-high-throughout environments by providing maximum yield, increased cost savings, and superior performance.
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