Used BROOKS AUTOMATION MTX 2000 #9203435 for sale

BROOKS AUTOMATION MTX 2000 is a high-end precision wafer handler for applications including semiconductor fabrication, metrology, and semiconductor test. MTX 2000 utilizes a unique three-axis fine motion control equipment to provide superior accuracy and repeatability for wafers placed into its temperature-controlled chamber. BROOKS AUTOMATION MTX 2000's fine motion control system is composed of three linear motors that control X-Y-Z positioning of the wafer. Three linear encoders measure and record the exact positions of the wafer. This intricate unit allows for single-micron wafer placement accuracy and ensures repeatability between MTX 2000 wafer transfer operations. BROOKS AUTOMATION MTX 2000 is capable of wafer loading/unloading, transferring, and aligning with an accuracy of less than four (4) microns. A high-capacity robotic vacuum gripper facilitates precise handling and transport of 6-12 inch diameter wafers. Additionally, an automated wafer mapping feature simplifies custom programming of multi-position wafer transfers. MTX 2000's on-board computer machine uses a graphical user interface to coordinate all wafer transfer operations. BROOKS AUTOMATION MTX 2000's programming software allows users to adjust the tool's transport parameters to optimize wafer transport speeds and accuracy. The wafer loading/unloading asset consists of a vacuum-based wafer cassette power supply, a vacuum-based z-axis lift, and a conveyer belt mechanism. To ensure contamination free wafer transfer, the wafer cassette power supply utilizes nitrogen gas and a special design to filter out contaminants. In addition to standard models, MTX 2000 is available in a Class 1 cleanroom configuration for applications requiring additional cleanliness and sterility. BROOKS AUTOMATION MTX 2000 offers a number of different temperature control, humidity control, and atmospheric pressure control functions to ensure the ideal environment for handling and processing wafers. Operating temperature ranges from -40°C to 300°C and maintains accuracy within ±1°C. The combined operations of MTX 2000 make it a perfect solution for a wide range of industries and applications.