Used BROOKS AUTOMATION MULTITRAN 5 #197759 for sale

BROOKS AUTOMATION MULTITRAN 5
ID: 197759
Robot 3-Axes.
BROOKS AUTOMATION MULTITRAN 5 is a high-performance wafer handler designed to meet the requirements of the most demanding semiconductor fabs. It is a fully automated SECS/GEM compliant equipment that provides reliable delivery and handling of 200mm and 300mm wafers in a fraction of the time it takes manual handlers. With its high accuracy and repeatability, MULTITRAN 5 is capable of operating in a high-throughput production environment. BROOKS AUTOMATION MULTITRAN 5 integrates a brushless DC servo motor and precision ball screw drive, providing high-resolution linear motion with repeatable and accurate positioning. Its powerful RFID-based wafer input/output capability enables the system to track the identity of each wafer and monitor their path throughout the manufacturing process. The unit is especially designed for efficient wafer transfer between multiple loadsports, cassettes, front end stockers, tool/probe sites, and metrology devices. Using its telescoping alloy track and a pair of independently motorized trays, the machine can pick-up / deliver a wafer for any point within its operating area. MULTITRAN 5 offers a high degree of expandability with a range of optional features including multiple banks of cassette interfaces for wafer delivery, robotic arm interface for gate control, remote IO, and additional tray. It also has an intuitive user interface for easy data entry, real-time diagnostics, and correct tool setup. In addition, its flexible motion control asset allows for easy integration into manufacturing environments, allowing for concurrenthandling and operation of multiple wafers within the same model. It provides an easy-to-use graphical user-interface that allows for quick equipment setup, and includes a full range of options to configure the system for your application specific needs. BROOKS AUTOMATION MULTITRAN 5 is designed for operation in harsh fab environments, assuring reliability and longer operational life with minimum maintenance. Using a patented carrierless design, it eliminates concerns associated with cassette and carrier deformation, and results in less stress on delicate wafers. Its robust construction ensures an extended life and the need for less maintenance and repair.
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