Used BROOKS AUTOMATION PRE-200-CE #9409375 for sale

ID: 9409375
Aligner.
BROOKS AUTOMATION PRE-200-CE is an advanced wafer handler designed to meet the needs of the semiconductor and solar cell manufacturing industries. This model is a fully integrated wafer handler with a Vacuum Transport Arm (VTA) and Pusher Arm (PA) that allow it to convey multiple wafer types up to 200 mm. Its vacuum transport equipment allows for precise wafer-handling, while its high speed actuation system ensures efficient operation. PRE-200-CE provides high accuracy and repeatability through its microprocessor-based controller which uses algorithms to differentiate between thin and thick wafers. Its high efficiency Pick-and-Place Wafer Transport Unit (PWTS) enables the mechanism to accurately align and transfer wafers of different sizes and thicknesses. Also, the controller can be programmed for multiple procedures such as patterning and stacking. The machine's functions are automated via its touchscreen interface, which simplifies set-up, operation and maintenance. The user-friendly interface also features an integrated recipe editor and reporting machine which enables users to customize wafer handling procedures. The unit is capable of transfer speeds up to 500 mm/sec, with the highest transport arm acceleration of up to 12 Gs. It also features a pressure-sensor based dynamic slot recognition, integrated video monitoring and a host of other automated functions. BROOKS AUTOMATION PRE-200-CE operates in an ultra-clean environment and is fully shielded to protect wafers from contamination. To ensure reliability, it utilizes an advanced bearingless drive tool and is made of materials specifically designed to resist corrosion and abrasion. Overall, PRE-200-CE wafer handler is a powerful, efficient, and reliable tool capable of handling a wide range of semiconductor and solar cell manufacturing processes with high accuracy and repeatability. It offers superior material compatibility, as well as robust protection against contamination, making it an ideal choice for the most challenging applications.
There are no reviews yet