Used BROOKS AUTOMATION Reliance ATR #9019144 for sale

BROOKS AUTOMATION Reliance ATR is a wafer handling platform that offers integrated, automated solutions for efficient and reliable processing, handling, and transfer of wafers. As its name implies, it is designed and built by BROOKS AUTOMATION, which has been a leader in the automation and semiconductor industry for decades. Reliance ATR offers outstanding performance in transferring wafers between process chambers and between process and storage locations. Its hybrid drive equipment ensures precise, low-vibration movements of the wafer to minimize the risks of contamination and wafer substrate damage. The system features automated cassette mapping for fast, accurate loading of cassettes from cassettes of mixed sizes into single and multiple position process grids. The unit also features an integrated fit cart that is designed to accommodate multiple sizes of cassette and process grids to provide maximum flexibility in wafer handling. BROOKS AUTOMATION Reliance ATR also features integrated diagnostics, programmed to detect most problems that could halt operations quickly and accurately. Additionally, easy access to cassette mapping and maintenance history provide useful performance-tracking and optimization. Reliance ATR is built with advanced safety features, including door locks, duress buttons and safety systems, to protect against tampering. This ensures that the machine does not expose operators to hazardous materials or moving parts, and it also increases the reliability of its operation. Overall, BROOKS AUTOMATION Reliance ATR is an efficient and reliable platform for handling and transferring wafers and offers a wide range of features and safety systems to optimize the process and ensure that wafers are not damaged during the process. Its hybrid drive tool, integrated diagnostics, and ease of access to maintenance history make it a great choice for any application that requires high-performance wafer handling.