Used BROOKS AUTOMATION Reliance ATR #9019152 for sale
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ID: 9019152
Atmospheric wafer transfer robot 8.4"
Single arm
Equipped with Keyence AP-31K pressure sensor module
Does not include:
Power cable
Date cables
Robot controller
Arm extension.
BROOKS AUTOMATION Reliance ATR is an advanced wafer handler technology that provides reliable, efficient, and flexible solutions to fabs and microelectronics manufacturers. The ATR utilizes a two-stage robot arm that enables efficient and rapid loading and unloading of single wafer cassette to cassette transfer. The robot arm rapidly moves a holder containing the wafer from cassette to cassette, ensuring that the wafer is swiftly transferred in production areas. The ATR robot arm also features a precise velocity profile to ensure accuracy of wafer placement. The ATR is designed for a variety of engineering and manufacturing requirements. It is equipped with an advanced programmable controller with a robust and intuitive user interface. This allows custom routines to be created for various wafer handling tasks in addition to maintaining a high level of automation. The system stores up to 4 cassette positions, making it ideal for high-throughput manufacturing. The ATR is designed with a rigid base and reliable components to ensure the highest levels of performance. It offers an expandable system architecture, allowing the integration of additional peripheral devices such as vision systems and laser markers. The modular design supports single or multiple cassette load or unload. The system is capable of transferring wafers at speeds of up to 30 WPM. The ATR also features an array of safety measures such as mechanical interlocks and emergency stop buttons to ensure safe operation. The sleek, compact design saves valuable space, while the integrated robotic arm allows for precise wafer handling. All of these features combined make Reliance ATR the ideal wafer handling solution for any microelectronics production line.
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