Used BROOKS AUTOMATION Techware 5 Express #293591708 for sale

ID: 293591708
Controller Model no: T5X-S2.
BROOKS AUTOMATION Techware 5 Express Wafer Handler is a purpose-built software and hardware equipment designed specifically to automate low quantity / batch wafer transfers from one process tool to another. This automation solution is an ideal choice for small labs and facilities, or for applications requiring low wafer throughput. Techware 5 Express Wafer Handlerfeaturessophisticated, user-friendly software, as well as reliable servo and stepper motors controlled by a dedicated 3-axis controller. This provides fast, accurate transfer of wafers with direct control over position, velocity, and acceleration parameters. The system software also allows for easy setup andconfiguring of wafer-to-wafer movement while monitoring actual/target position and velocity values. Additionally, the unit includes integrated Pick and Place tools for autonomously and safely lifting wafers from load ports, as well as an analog +/- 10V input for optional control of the mechanical robot arm. This wafer handler is fully equipped with safety features, including an emergency stop and safety interlocks to protect the machine from interference. The tool is also capable of storing up to 200 programs for controlled and repeatable manufacturing operations. The integrated functional safety assessment greatly increases the safety and reliability of the asset. For example, the robot must be in a ready state before a motion command is allowed and input and output signals must be in a predetermined logical condition before any motion occurs. BROOKS AUTOMATION Techware 5 Express Wafer Handler has a robust construction with stainless steelcolumns and painted base plate, and is designed with low maintenance and upkeep -simplyplug it in and the model is ready to use almost immediately. With superior performance and speeds reaching 1m/s and a repeatability of +/- 0.05mm, this wafer handler is an ideal solution for batch transfers in semiconductor manufacturing processes. With an intuitive user interface and advanced safety features, Techware 5 Express Wafer Handler is the right choice for achieving your automation needs.
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