Used BROOKS AUTOMATION VAC-409 #293641123 for sale

BROOKS AUTOMATION VAC-409 is a wafer handler designed to quickly and efficiently transport, manipulate, and deliver semiconductor-based material sets. This versatile machine can be used in a variety of applications, ranging from simple robotic material handling to complex vacuum-assisted heavy process steps. The machine operates with a unique combination of vacuum ports, high-precision servo motors and interfacing components to deliver reliable and repeatable performance. Its modular design allows for operation in a wide variety of processes, such as die removal, sorting, metrology, and other advanced material processing. VAC-409 is capable of handling 1", 2", 4", 6", and 8" wafers with a payload of up to 250 grams, regardless of orientation. It also features a detachable vacuum supply and available liquid temperature control with EMC material sets. The robot has a total travel range of 250 mm in the X-axis and 126 mm in the Y-axis, enabling it to pick up, carry, and deposit material sets in all orientations. Its long-life vacuum pumps offer both static and dynamic vacuum control with a choice of drive torque, enabling force control and system flexibility. The design of BROOKS AUTOMATION VAC-409 is optimized to reduce wear and maximize accuracy. The machine features low-inertia servo motors, with non-contact linear encoders to provide ultra-precise movement of the wafers. The entire system is equipped with user-friendly tools for easy maintenance. VAC-409 is an ideal choice for semiconductor materials processing applications. It offers excellent support for a wide range of material sets and processes, providing reliable performance with excellent repeatability. Whether used for simple robotic material handling or for intricate vacuum-assisted process steps, BROOKS AUTOMATION VAC-409 is a robust and reliable solution.