Used BROOKS AUTOMATION VAC407 #9211501 for sale

BROOKS AUTOMATION VAC407 is a wafer handler designed for use in semiconductor fabrication manufacturing processes. VAC407 is an automated equipment for exchanging wafers between process tools, such as etchers and furnaces, and wafer cassettes by means of robotic arms. BROOKS AUTOMATION VAC407 can process nine and twelve-inch wafers, as well as eight, twelve, and sixteen-inch wafers up to a thickness of 200 microns. The system is operated through a user-friendly graphical user interface (GUI) running on a touch screen panel. This makes it easy for operators to modify the parameters of the process recipes. The parameters that can be adjusted include the location and orientation of the wafer, the wafer velocity and acceleration, the travel time between different tools, and the levels of vacuum and pressure used. VAC407 is equipped with two independent robotic arms for exchanging the wafers, allowing for simultaneous transfers between processing tools and wafer cassettes. The unit is equipped with a vacuum pickup that holds the wafer in the correct orientation for exchange. In addition, the machine has unique mapping algorithms that ensure accurate transfers. BROOKS AUTOMATION VAC407 is equipped with a powerful Cognex Vision Tool for locating and verifying wafer cassettes and tools. This ensures that the robot arm always correctly identifies and exchanges wafers with the correct wafer cassettes, and the correct processing tools. VAC407 is also equipped with an integrated safety asset for preventing robot collisions, environmental contamination, and abnormal process conditions. The model includes powerful pneumatics and software safety functions, such as automatic tool shutoff and emergency stop buttons. The equipment also has a self-diagnostic feature that automatically checks for any abnormal conditions and indicate them on the touchscreen, ensuring that the system can be safely operated. BROOKS AUTOMATION VAC407 is a reliable, user-friendly wafer handler that ensures accurate transfers and prevents wafer contamination during the processing process. The unit is also equipped with powerful safety features and a self-diagnostic feature, making it highly reliable and reducing the potential for failure.