Used BROOKS AUTOMATION VacuTran 5 #9013390 for sale

BROOKS AUTOMATION VacuTran 5 is an advanced, automated wafer handler used in semiconductor manufacturing. VacuTran 5 contains multiple process specific options that can be tailored to customer requirements. Built on a flexible platform, BROOKS AUTOMATION VacuTran 5 is suitable for a variety of semiconductor applications, including wafer transport, wafer sorting, in-situ wafer processing, and wafer recycling. VacuTran 5 consists of two major components: a base unit, which houses the transport mechanism, and a controller module, which houses the software and user interface. The base unit consists of a robust frame, motorized transport rails, and a sliding drawer that houses the wafer transporters. The transporters are guided by wheels on rails, pushed and pulled by an electrical motor. The motorized drive system is designed to provide optimized performance regardless of the varying sizes and shapes of the wafers. The controller module contains the software engine and user interface. The software is designed to facilitate the transport and manipulation of the wafers. It includes an automated setup process which includes analyzing the wafer sizes and shapes, choosing the best transport speeds, and the pattern of the wafer's span. The automatic wafer aligners ensure accurate positioning of the wafers before transport, eliminating any potential misalignments. Furthermore, BROOKS AUTOMATION VacuTran 5's unique wafer shaping assembly can also be used to re-shape and demodulate the wafers. VacuTran 5 offers a variety of safety features, including a built-in environmental control system to regulate temperature and humidity, as well as safety sensors which detect and alert personnel if there is any excessive movement or handling. BROOKS AUTOMATION VacuTran 5 is also the only wafer handler with a fully automated wafer loading and unloading function. The system dispenses the wafers safely and accurately, with the ability to handle large and small wafers at the same time. Overall, VacuTran 5 provides a robust and reliable platform to facilitate the efficient and accurate handling of semiconductor wafers, making it ideal for industrial applications. With features such as automated transport and user-friendly software, BROOKS AUTOMATION VacuTran 5 offers high performance, versatility, and safety to any semiconductor production line.