Used BROOKS AUTOMATION VTR-5 #293666638 for sale

BROOKS AUTOMATION VTR-5 Wafer Handler is a device used to move and manipulated wafers within wafer processing equipment. It is capable of single or double-sided wafer handling operations with a cadence of up to 800 moves per minute. VTR-5 safely transports wafers between cassettes, reactors, mask aligners, ovens, and ion implanters. It has an optional wafer input/output shuttle for conveyance of wafers at a greater speed. BROOKS AUTOMATION VTR-5 features a modular bridge carriage assembly that supports both single and double-sided wafer handling operations. Its easy-to-integrate wafer shuttle design allows for robot loading/unloading and quick wafer transfer. The control electronics feature a push-button user interface and LED/LCD displays to indicate when a given component is in transporting mode or in error mode. VTR-5 has a two-stage design to ensure wafer protection and precise wafer manipulation. The first stage involves a lint-free cloth wrapped around the wafer pod to prevent particle contamination. The second stage involves the use of a sensitive wafer-positioning apparatus which allows for clamping, positioning, and rotation of a wafer. This sensitive operation enables accurate placement of wafers relative to the alignment register markers. The wafer handling mechanism is made up of a three-link profile allowing for accurate wafer processing. This three-link profile is driven by a stepper motor and can handle wafer sizes ranging from 50 to 300 mm. BROOKS AUTOMATION VTR-5 also features a large wafer loading and unloading area which helps reduce breakage and contamination. The wafer handler is controlled by a Modular Automated Protocol Carrier (MAPC) program. The program stores user-defined recipes and provides an easy-to-use graphical user interface to quickly program and control wafer handling operations. Communications with various equipment is enabled via the RS-485 protocol. The system is powered by an Allen-Bradley PLC and is safely plugged into a 3-phase power source. VTR-5 Wafer Handler is a highly reliable and flexible tool for the manipulation of wafers in a wide range of wafer processing applications. The automated operation helps ensure precision, accuracy, and control of wafer movement while helping reduce the possibility of particle contamination and physical damage. With its wide range of features and capabilities, this wafer handler is an excellent choice for wafer handling tasks in organizations such as laboratories, semiconductor, and integrated circuit manufacturing companies.