Used BROOKS Magnatran 7 #293604921 for sale
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ID: 293604921
Robot
NOVELLUS Driver P/N: 003-1600-25
NOVELLUS Arm set P/N: 002-0016-04/14.
BROOKS Magnatran 7 is an automated wafer handling equipment designed to provide high throughput, maximum efficiency and reliable processing of single and dual stack wafer configuration. Its automation and flexibility enable it to be used in environments from research and development to high-volume production. The system has a wafer handling area where wafers of various widths are processed in a C-type plant configuration. The wafers are processed in either top or bottom support and can range in size from 150 mm to 300 mm in diameter. The wafers are held firmly in place using two clamp and roll systems, while they are transported up and down a vertical track. Wafers are placed and removed manually or via a robot loader/unloader. When in operation, the unit performs multiple process steps such as spin coating, ashing, edge-bead sealing, baking, and drying. Magnatran 7 is driven by a proprietary servo motor that features high speed and precise position accuracy. This enables the machine to rapidly accelerate and decelerate the wafer track, ensuring the wafers are moved with the correct timing and speed at all times. Moreover, the machine has the ability to accurately detect and adjust the position of the wafer track whenever a stop is required, making it suitable for high speed operation. In addition, theBROOKS BROOKS Magnatran 7 also provides a number of advanced control functions and processes, including monitoring of tool events and parameter setting, to ensure reproducible process performance and yield. It also has an error-recovery message feature that warns of wafer mis-processing before material is lost. The machine is also equipped with a comprehensive fault detection asset and an array of safety features that help to reduce the chances of physical accidents. Overall Magnatran 7 provides reliable, accurate and high throughput operation with an easily configurable micro-processing environment. It is ideal for a wide range of wafer processing applications, ranging from research and development to high-volume production.
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