Used BROOKS / PRI AUTOMATION 003-9010-13 #9111117 for sale
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BROOKS / PRI AUTOMATION 003-9010-13 is a mechanized wafer handler used in the industrial semiconductor industry. This wafer handler is designed to transfer and move wafers in the highest accuracy and reliability. It can handle substrates that are up to 200mm in diameter. The Automation BROOKS 003-9010-13 is composed of a two-axis servo drive equipment and a stationary, gravity-fed wafer chute. The two-axis servo drive system is driven by a closed loop digital servo unit for accurate and fast positioning control. The servo motor features sinusoidal or trapezoidal motion profiles, and is designed to handle wafers at the highest speeds without affecting accuracy. The drive machine is also equipped with an interrupt tool and programmable current limit to ensure safe handling of delicate wafers. The static wafer chute is designed to deliver up to four wafers accurately and reliably to the handler. It features individual loading/unloading ports for each wafer and allows switching between batch loading and continuous feed. Additionally, the wafer chute is designed to reduce wafer deflection and is designed to minimize vibration and noise. PRI AUTOMATION 003-9010-13 has a number of additional features that help to ensure its reliability and accuracy, such as an integrated ESD protection asset, sealed optical encoders, and an onboard, digital data acquisition and control model. All of these features ensure that the wafers can be handled with high accuracy and reliability. The Automation 003-9010-13 is designed to meet the needs of the industrial semiconductor industry. The features of this wafer handler make it an ideal choice for those who require advanced wafer handling solutions that can meet demanding accuracy requirements. With its advanced features and ease of use, BROOKS / PRI AUTOMATION 003-9010-13 is an excellent choice for those who need high quality, reliable wafer handlers.
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