Used BROOKS / PRI AUTOMATION 105151 #9267821 for sale

BROOKS / PRI AUTOMATION 105151 wafer handler is a top-of-the-line equipment equipment used for the handling, processing, and transport of semiconductor wafers in laboratories and other cleanroom environments. The system provides precise wafer handling operations in a range of semiconductor fabrication applications from thin-film deposition to lithography to metrology, as well as offering light-tight laboratory enclosure to protect the wafers from contamination. The wafer handler consists of a main unit, autoloader port, wafer conveyor, vacuum robot, array of manipulator arms, 90° angle lift and wafer tray, and air actuator and control systems. The main unit houses the robot and other components to create a retrievable transfer chamber that is airtight and maintains a consistent temperature and humidity environment. The autoloader port efficiently and accurately manages wafer input and unload processes. It is a fully mechanical unit designed to minimize particle generation and contamination. The conveyor moves the wafers, cassettes, and trays for loading/unloading through the chamber, enabling seamless transfer and handling of wafers between cassettes and/or trays. The manipulator arms follow programmed routes inside the robotic module during wafer transfer. The arms feature built-in guards to prevent accidental contact with the wafers and safety sensors to shut off operating elements when alerted. The 90° angle lift consists of a drive, lift, and rotator assembly that mechanically transports wafers from the tray level to the robot level. The wafer tray is a smart device which takes the cassette, tray, and/or wafer from the robot and transports them to the tray level. The air actuator and control systems provide automation sequence control, and individual actuator systems for each arm coordinate movement to predetermined positions at the highest possible level of accuracy. BROOKS 105151 wafer handler is designed to ensure high accuracy in wafer transportation without compromising the cleanliness of the lab. Its advanced automation machine provides reliable wafer handling functions, while the internal chamber offers a highly clean and controlled environment, helping to protect wafers from contamination and maintain consistent operating temperatures.