Used BROOKS / PRI AUTOMATION 5850C #9144548 for sale
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BROOKS / PRI AUTOMATION 5850C is an automated wafer handler designed to rapidly move and manipulate wafers in a variety of semiconductor manufacturing processes. The robotic equipment performs precise wafer handling to maintain process performance and generate high device yields. The system operates from a single workstation and is capable of controlling up to 4 wafer robots. BROOKS 5850C is built with a reliable design that optimizes productivity in a variety of semiconductor manufacturing environments. The robot offers an ultra-precise motion control unit, with repeatable accuracy on the order of 0.001mm in all axes. This allows minute wafer modifications and enables reliable device performance. The machine is equipped with a vision-guided inspection machine which enables quick wafer sorting using preprogrammed parameters. The robot is capable of automatically measuring radius and diameter of the wafer, and even performing an automatic inspection on the wafer edges. The protective wafer chamber is equipped with filters and Vacuum/Nitrogen exchange capabilities, allowing the machine to complete wafer handling operations without contamination. The tool also features an intuitive user interface with a variety of features, such as recipe programming for integrated process control. The robot's use of advanced manufacturing techniques allows for increased speed, precision, and reliability. Additionally, simulations and modeling can be used to resolve process issues, while an automatic calibration feature ensures that the robot's performance is maintained over time. In short, PRI AUTOMATION 5850C wafer handler is an intelligent, efficient robot designed to quickly and accurately complete a variety of wafer processing tasks in semiconductor manufacturing. By combining advanced process controls with a reliable motion control asset, the robot is capable of producing high device yields in a timely fashion.
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