Used BROOKS / PRI AUTOMATION 5850E #9263562 for sale

BROOKS / PRI AUTOMATION 5850E Wafer Handler is a state-of-the-art device designed to safely handle and transport high-temperature semiconductor wafers and maximize wafer throughput in large and medium-sized wafer production operations. This wafer handler is capable of handling a range of wafer sizes from 2-6 inch for a variety of applications in the fabrication of a wide variety of electronic devices. The machine has an integrated vision equipment that provides precise wafer orientation and positioning with the highest possible accuracy. BROOKS 5850E includes a high-torque 6-axis manipulator arm as well as motorized translations, enabling the robot to quickly complete production wafer movement operations. It also features a tool changer system that provides the flexibility to switch easily between up to three different wafer clamping tools. This gives the user an extensive range of wafer-handling options. Additionally, it has built-in vibration dampening technology to minimize wafer damage during transportation and a patented load-on-the-fly wafer clamping unit. The machine also carries safety features to protect personnel as well as other machines and components. These include an internal Enclosure Leak Detection Tool with a series of trip points that instantly stop the asset if the enclosure is breached or if a hot wafer is detected. It also features a Self-Monitoring Model which will alert the user if any of the equipment's sensors detect a problem. PRI AUTOMATION 5850E Wafer Handler is an advanced and reliable system that offers an impressive combination of speed, flexibility, accuracy and safety. It is a versatile tool designed for any commercial or research semiconductor wafer handling application, and is sure to provide the user with many years of reliable and trouble-free operation.