Used BROOKS / PRI AUTOMATION 5850E #9263576 for sale

BROOKS Model BROOKS / PRI AUTOMATION 5850E Wafer Handler is a precision automation equipment that is designed to securely and accurately handle and move wafers in and around a semiconductor manufacturing environment. The handler is built to reliably transport wafers from one handling station to another and is safe to use in clean room or wafer fabrication environments. The Model BROOKS 5850E is composed of three main components: The Wafer Handling Subsystem, the Robot Subsystem, and the Peripheral Subsystem. The Wafer Handling Subsystem is the interface between the Wafer Robot and its associated peripherals and is responsible for controlling the handling of the wafer throughout its fabrication process. It is designed to provide a secure and safe handling of wafers using a spring-loaded escapement mechanism and clean tools to pick up and deposit wafers. The Robot Subsystem of the Model PRI AUTOMATION 5850E performs the tasks of moving wafers in their transport system. It consists of a high-speed, two-axis robot with a handling capacity of twelve 150mm (6 inch) wafers and four 200mm (8 inch) wafers. The robot is loaded with a high-speed DC servo motor for precise and consistent motion and is capable of reaching speeds of 780mm/sec while accelerating from 0 to full speed in just 0.3 seconds. The robot employs positional accuracy of +-0.04mm. The Peripheral Subsystem of the Model 5850E includes all components required for wafer fabrication, such as wafer loaders and unloaders, servo drives, wafer probers, wafer transport trays and various other fixtures and accessories. This subsystem is designed to ensure that all associated peripheral equipment works seamlessly and that no additional components can be sources of contamination or transportation errors. In conclusion, PRI AUTOMATION Model BROOKS / PRI AUTOMATION 5850E Wafer Handler is an advanced automation unit designed to securely and accurately handle and move wafers in and around a semiconductor manufacturing facility. It allows for precise and consistent motion with a positional accuracy of +-0.04mm, and has the capability of transporting up to sixteen wafers at speeds of 780mm/sec. The machine has been designed to ensure that all associated peripheral equipment is source free and operates without contamination or errors.