Used BROOKS / PRI AUTOMATION 5850E #9263589 for sale

BROOKS / PRI AUTOMATION 5850E is a versatile and reliable wafer handler for semiconductor production facilities. Its fully automated operation enables it to quickly and accurately move wafers through the handling process. BROOKS 5850E is powered by two independent, 256-step stepping/servo motor axis systems. Each axis equipment is capable of precisely positioning the wafers, with step resolution as low as 1.3 microns. The handler can be equipped with up to three wafer trays, enabling it to hold up to forty-eight 200mm or sixty-six 150mm wafers at a time. It can also accommodate up to four 500mm wafers. PRI AUTOMATION 5850E also comes standard with two load locks, each with its own mechanical, pneumatic, and vacuum system. This enables the handler to rapidly and accurately load/unload wafers into the wafer tray, reduce down time due to high-volume handling, and reduce particle contamination. 5850E is also equipped with a number of safety features, such as a programmable emergency stop unit, an optional beam detector, and an array of sensors. These features provide an extra level of protection and assurance that all operations are running smoothly and safely. BROOKS / PRI AUTOMATION 5850E's control machine consists of a programmable logic controller (PLC), which enables the user to easily create repeatable, programmable processes. This allows for customized handling of large volumes of wafers over short periods of time. The user can also access parametric data via the machine's graphical user interface (GUI) and access predefined recipes for running processes and creating new ones. BROOKS 5850E is an efficient, accurate, and reliable wafer handler for use in semiconductor production facilities. Its adjustable tray tool, load locks, safety features, and intuitive control asset make it an ideal choice for high-volume handling.