Used BROOKS / PRI AUTOMATION 5850E #9263590 for sale

BROOKS / PRI AUTOMATION 5850E is a versatile wafer handler designed for timely and reliable processing of wafer assemblies. This automated tool enables precision handling of up to 12 wafers in a single cycle, including loading, transferring, and unloading. BROOKS 5850E also enables precise grinding, polishing, and deburring operations using up to 6 spindles for grinding and polishing. The dedicated, four-axis wafer manipulation system allows for accurate positioning of the wafers, enabling quick and accurate transfers between vessels. The advanced transport-series robots are equipped with ceramic brushes and suction cups for precise wafer handling. Its pneumatic grippers provide efficient force control for automated loading and unloading processes. PRI AUTOMATION 5850E features an intuitive software platform that allows customers to configure automated recipes, maximize throughput and process repeatability, and initiate manual operations. It supports the use of real-time Recipe Management (RRM) functions, including recipe revision, debug, and simulations. The system is equipped with robust safety measures to ensure operator safety and top-notch performance. Its robust safety features include a chamber interlock, single-cycle reverse interlock, braking capability, and speed control and limit switches for each wafer tray. 5850E is an impressive and comprehensive wafer handler system, giving customers the ability to confidently handle wafers with accuracy and consistency. This automated platform is ideal for high-volume production cycles, providing superior accuracy and repeatability for efficient and reliable wafer processing.