Used BROOKS / PRI AUTOMATION 5858-1J1A1A5 #9141153 for sale
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BROOKS / PRI AUTOMATION 5858-1J1A1A5 Wafer Handler is a lightweight, versatile machine designed for semiconductor processing applications. It is capable of handling wafers up to 200mm or 8 inches in diameter. The handler utilizes an internal wafer transport module to move wafers from the loader to the user's wafer processing equipment. The handler offers pick and place and alignment capabilities for precise handling of wafers. The automated wafer handler features a modular design consisting of two independent components, the head and tray. The head is designed to accept substrates up to 8 inches in diameter. It is equipped with four independent end-effectors that align the wafers for proper handling. The end effectors align the wafers so that they fit securely in the holder and prevents them from flexing during transport. The head is mounted on a linear servo trays that provide smooth and precise motion control. The two servos independently control the upper and lower trays, allowing the head to move in a vertical or horizontal direction for optimal alignment of the wafer's position. The tray or base is the second component of the handler. It is equipped with a vacuum equipment that secures the wafer during transport. The tray also has a cleaning system, designed to minimize contamination of the wafer and provide critical surface preparation before loading. The wafer is taken from the tray and fed into the user's wafer processing equipment, completing the transfer. BROOKS 5858-1J1A1A5 Wafer Handler is a user-friendly unit designed for reliable operation in semiconductor processing applications. The machine's modular design, alignment capabilities, and automated loading process provide maximum flexibility for wafer transfer. The tool can be integrated with a variety of wafer processing equipment, making it an ideal choice for multiple application scenarios.
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