Used BROOKS / PRI AUTOMATION 5864E #9007054 for sale

BROOKS / PRI AUTOMATION 5864E is an industry-leading wafer handler for use in front-end semiconductor fabrication processes. With its durable and reliable design, it is especially well suited for operations where extreme reliability and repeatability are paramount. BROOKS 5864E wafer handler features a state-of-the-art design that enables faster and more accurate positioning of wafers in the process module, thereby providing improved yield and system stability. Its compact modular design allows it to fit into a variety of spaces and requires minimal maintenance, ensuring smooth and efficient operation. The wafer handler is equipped with a non-contact wafer guiding system that enables accurate wafer handling at up to 6,800 wafers/hour. It is also equipped with an integrated robot arm capable of indexing wafers and a hot loop load/unload station, ensuring reliable and repeatable operations. Additionally, its efficient wafer transport system enables it to move wafers with minimal vibration and precise positioning. PRI AUTOMATION 5864E wafer handler also provides efficient transport for a variety of wafer sizes from 8 inches to 12 inches of diameter. Its onboard intelligence ensures an enhanced level of process monitoring and supervision. Its full integration with a variety of I/O sources allows for superior process control and yield optimization. The wafer handler is certified by various organizations for ESD Precautions Class 1 and Global Standards of IEC 61241-2-2. This ensures safety during its operation. Additionally, it also is compliant with the RoHS Directives and CE Mark Certifications, granting it high levels of safety, environmental friendliness, and regulatory compliance. In summary, 5864E is an advanced wafer handler designed to provide precise handling, improved throughput, and yield optimization capabilities for semiconductor fabrication processes. It has a state-of-the-art design that guarantees reliable operation and is compliant with industry laws and regulations. With its numerous advanced features and ease of maintenance, it is an ideal solution for any front-end semiconductor production.