Used BROOKS / PRI AUTOMATION 7000 Series #80123 for sale
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ID: 80123
Box reticle stockers
With (3) SVG Reticle stockers, 11.5" x 144"
(3) NIKON Reticle stockers, 11.5" x 144"
1998-2000 vintage.
BROOKS / PRI AUTOMATION 7000 Series is a high-performance wafer handler designed to provide reliable production of wafers in an industrial setting. The equipment is made up of two main components, an automated wafer transport system and a wafer clamping/unclamping module. This combination of components allows for fast, precise wafer movement and accurate positioning along a production line. The Automation 7000's transport unit is designed for precise and reliable handling of wafers up to eight inches in diameter. The machine is equipped with a three-axis linear X-Y-Z gantries and a rotary table for the precise alignment of each wafer along its path. This transport tool offers high accuracy at maximum throughput to meet the needs of production lines. The wafer clamping/unclamping module enables fast, accurate handling of the wafers. The module utilizes four vacuum actuated clamps to secure the wafer along its movement path. Each clamp is capable of providing more than 450 pounds of clamping force, ensuring that the wafer is securely held during its movement. The automated motion control of the module provides accuracy and repeatability to ensure that the proper alignment of the wafer is maintained. The Automation 7000 is also equipped with a set of safety features to ensure the safety of operators, the equipment, and the wafers. A collision avoidance asset is included in the design of the transport model, while the wafer clamping/unclamping module is equipped with an emergency stop equipment and enclosure interlocks. Overall, BROOKS 7000 is an accurate and efficient wafer handler designed to provide reliable production of wafers. The integrated transport and clamping/unclamping system combines for fast, precise wafer movements, while the safety features on both the transport unit and clamping module ensure the safety and accuracy of each wafer handling operation.
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