Used BROOKS / PRI AUTOMATION 9700-7232-01 #9175424 for sale

BROOKS / PRI AUTOMATION 9700-7232-01 is a wafer handler designed for use in semiconductor fabrication applications. The equipment is capable of handling 6 to 8 inch wafers from cassettes, transfer and orient them onto a vacuum chuck, and transport them to and from process chambers. The automations system is comprised of a series of belts, drive shafts and linear motion actuators that work in harmony to provide smooth and precise motion throughout its range of movement. At the heart of the unit is the transfer arm. It is a multi-axis device consisting of two independently driven arms that provides precise and accurate control over the wafer within its working range. The base of the transfer arm is mounted to a vertical support post which allows for free range of motion around all three axes. The base of the arm is also equipped with a vacuum port. This vacuum serves to securely grip the wafer within its operating range while still allowing for minimal movement. The base of the arm is also equipped with an orientation sensor (or 'eye') that is used to detect the orientation of the wafer as it is being moved. It can detect both clockwise and counterclockwise direction, as well as up and down orientation. Another integral part of the machine is the vacuum chuck. It is a flat circular platform that is mounted at the end of the transfer arm. It is designed to securely grip the wafer in place during transport to and from the process chamber. The chuck is equipped with a series of pins that are designed to retract when vacuuming takes place. This ensures that the wafer is securely held in place while still allowing for minimal movement. The tool is also equipped with a series of belts that transfer the wafers from the cassette to the process chamber. The belts are all driven by a servo motor that allows for smooth and precise control over the speed and direction of the belt. The asset is also equipped with a series of limit switches and sensors that ensure that wafers are always transferred in the correct way and that the process will not be interrupted. BROOKS 9700-7232-01 is a highly capable model that provides precise and accurate wafer handling capabilities for semiconductor fabrication processes. Its robust design and wide range of features ensure that it can handle a variety of wafers ranging from 6 to 8 inches. The combination of its advanced motion and orientation capabilities, reliable belt and chuck systems, and numerous sensors makes it the perfect choice for automated wafer handling in a variety of applications.