Used BROOKS / PRI AUTOMATION ABM-407 #132339 for sale

BROOKS / PRI AUTOMATION ABM-407
ID: 132339
Wafer Size: 8", 12"
Robot, 8" and 12".
BROOKS / PRI AUTOMATION ABM-407 Wafer Handler is a highly automated and integrated robotic equipment designed to reliably and accurately transfer, align, and handle precise quantities of semiconductor wafers known as substrates. BROOKS ABM-407's precise design and construction make it an ideal option for applications requiring efficient handling of fragile and expensive substrates. PRI AUTOMATION ABM-407 utilizes processing chambers known as BRIO PASS Vacuum Clamps to attach substrates built with a variety of materials including quartz and silicon. The end effectors connected to the vacuum clamps are capable of holding from four to twelve substrates at a time, depending on the specific clamp configuration used. The positioning system utilizes two-axis gimbaled modules that allow for precise rotation and positioning of the substrates. This enables precise placement and repositioning of the substrate for high accuracy probing. ABM-407 is designed to provide seamless integration into existing factory automation systems. It is designed to interface with industry-standard models of ATM and other machine controllers. Additionally, BROOKS / PRI AUTOMATION ABM-407 has built-in safety features, such as a warning unit that alerts operators to potential collisions. For example, the warning machine will illuminate if the wafer handler approaches too close to an object or person. BROOKS ABM-407 is incredibly easy to use, has easy operator access for substrate loading and unloading, and has high repeatability and reliability. The tool features an integrated vision asset for positioning and substrate recognition, debounce and z-tilt functions for better probing accuracy, and high-accuracy movements for probing and alignment. Additionally, PRI AUTOMATION ABM-407 also features precision temperature control and moisture measurement software, so that the environment and substrates can be monitored accurately during experiment runs. Overall, ABM-407 Wafer Handler is a reliable and automated wafer handling model that is capable of aligning, handling, and transferring substrates with a high degree of accuracy and reliability. It is designed with a variety of features and functions to ensure that the substrate can be handled safely and efficiently.
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