Used BROOKS / PRI AUTOMATION Aerotrack #9099516 for sale
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BROOKS / PRI AUTOMATION Aerotrack is a advanced wafer handler designed to meet the needs of the most demanding semiconductor fabrication applications. The equipment is an automated wafer loader/unloader, capable of transferring multiple wafers between different process tools and related equipment quickly and reliably. It provides a cost-effective, space-saving solution for many chip manufacturing lines. BROOKS Aerotrack is designed to enable multiple wafer transfers with a minimum of space usage, allowing for quick and easy loading and unloading of wafers. The system utilizes an articulated robot arm that provides precise, repeatable movements of wafers during loading/unloading operations. It can move wafers up to 200 mm in diameter, as well as a maximum weight of 10 kg. The robot has been designed to offer maximum flexibility to accommodate a variety of wafers, as well as different processes. It can be quickly adapted to different workstations, from automated wafer inspection to die bond. PRI AUTOMATION Aerotrack's high-precision motion control and integrated safety features ensure safe and reliable operation in a wide range of production environments. It also features anti-collision protections for additional safety. Its advanced control unit is capable of automatic handling operations along with general and specific information for individual wafers, tracking part numbers and serial numbers. The robot is powered by an AC servo motor, allowing it to perform high-speed and accurate cubic movements with low vibration. Aerotrack can be interfaced to different types of external equipment, including controllers, printers, cameras, and other related process equipment. Other features include a fully featured touch-screen interface that provides an intuitive platform for machine operation. The machine is also equipped with a SMEMA-compliant port for communication with other automated systems. Overall, BROOKS / PRI AUTOMATION Aerotrack is an advanced and reliable wafer handler that is designed to provide maximum efficiency and accuracy for wafer processing. Its sophisticated features and safety mechanisms make this an ideal tool for any semiconductor fabrication line looking to automate their operations. The intuitive touch-screen interface and easy integration with other equipment makes it a perfect solution for a wide variety of applications.
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