Used BROOKS / PRI AUTOMATION ATM-100 #9064556 for sale

BROOKS / PRI AUTOMATION ATM-100 is a high-performance wafer handler designed to meet the needs of modern electronics and semiconductor fabrication facilities. The unit utilizes a multi-axis motion equipment, high-speed robotic arms, and digital image processing to quickly and accurately move, clean, inspect, and transport wafers in a variety of sizes and shapes. BROOKS ATM-100 features an advanced vision system with three high-resolution cameras that perform a variety of functions. The integrated vision unit is capable of correcting position and orientation of wafers during placement, as well as rapid edge and corner recognition. An integrated vision-based centering algorithm enables the unit to reliably position and react to the perceived location of each wafer. The integrated vision machine also allows the handler to distinguish between different wafer types and verify critical dimensions and imperfections. PRI AUTOMATION ATM-100 also features an integrated thermal FOUP (front opening unified pod) handling tool which handles both open and closed FOUP containers, allowing for semi-automated transfer from a wafer loader to other processing equipment. This unit features a vacuum-based wafer handling technology which is capable of providing gently and precise part handling, while maintaining the highest possible throughput and accuracy. ATM-100 also features application-specific handling algorithms programmed to meet the needs of the operator. This technology allows for efficient user-dependent part handling routines. The unit also includes a Proprietary Secure Semiconductor Data Exchange Protocol for secure data exchange of wafer information, enabling flexibility and productivity. In terms of safety, BROOKS / PRI AUTOMATION ATM-100 includes manual load and unload safety zones and external emergency stop, as well as standard input/output port for monitoring and connecting alarm systems. The unit also utilizes contamination free methods, including pressurized sleeves and nitrogen-geared cleanroom protocols. In summary, BROOKS ATM-100 is a comprehensive wafer handler utilizing advanced vision systems, vacuum-based handling, application-specific handling algorithms, and Proprietary Secure Semiconductor Data Exchange Protocols to maximize performance in modern electronics and semiconductor fabrication facilities. The unit also includes safety features such as input/output port and nitrogen-geared cleanroom protocols to protect users.