Used BROOKS / PRI AUTOMATION ATM 105-1-2-S-RHS #185016 for sale

BROOKS / PRI AUTOMATION ATM 105-1-2-S-RHS is an automated wafer handler designed to enable high accuracy wafer transfer and alignment. It is capable of handling wafers up to 200mm in diameter, and uses a 2-axis robotic arm to move the wafer between different cassette systems. The arm can be programmed to move the wafer in up to three axes under manual control, allowing for precise and accurate alignment of the wafer. BROOKS ATM 105-1-2-S-RHS is equipped with optical sensors for wafer recognition, enabling it to accurately locate, position, and align each wafer in the correct cassette equipment. A vision system can also be used to orientate and align the wafer during transfer. In addition, the robotic arm can be programmed to clamp and unclamp the wafer as needed. PRI AUTOMATION ATM 105-1-2-S-RHS is designed to be a reliable, repeatable, and safe wafer handling solution. It requires minimal operator intervention, with only basic user input required to program the robotic arm. The unit also utilizes a self-testing procedure before and after operation, which allows it to automatically run diagnostic tests and identify and report any errors it may encounter. ATM 105-1-2-S-RHS is constructed with a rigid aluminum frame and includes a dust filter to ensure clean operational conditions. It is also equipped with a set of safety components that ensure the long-term safety of operatives, including acid sensors and a fire suppressant machine. The tool can also be equipped with additional safety options as needed. Finally, BROOKS / PRI AUTOMATION ATM 105-1-2-S-RHS can be used in a wide range of wafer handling applications. This makes it suitable for use in a variety of semiconductor manufacturing, research, and laboratory facilities. With its high accuracy, programmability, and reliability, BROOKS ATM 105-1-2-S-RHS is an ideal solution for automated wafer transfer and alignment.