Used BROOKS / PRI AUTOMATION ATM 105-1-2-S-RHS #9116101 for sale

BROOKS / PRI AUTOMATION ATM 105-1-2-S-RHS is an advanced wafer handler designed for the processing of single wafer substrate. It is capable of running up to 1,200 wafers per hour and can accommodate 6- to 8-inch wafers. This wafer handler is configured to be directly integrated with a BROOKS ATM Wafer Inspection and Metrology Equipment such as the ATM 210-600-100-S. It is also capable of being connected to a ZED Automation robot arm for the transfer of wafers between the wafer handler and the metrology system tracks. BROOKS ATM 105-1-2-S-RHS comes encased in a stainless steel frame, is UL rated, and features a sanitary design that meets JEDEC cleanroom standards. Up to 150 wafer cassettes can be shipped safely in the unit thanks to the inclusion of Dual-Sided Mode where the Handler can be run from both sides of the unit depending on the Operator's wafer unloading requirements. The unit also features safety doors, which helps protect machine integration personnel from any potential harm while working with the unit. PRI AUTOMATION ATM 105-1-2-S-RHS is powered by an AC drive tool with a three-phase 110 or 208V power and can run autonomously at a speed of 0-200 halves/minute. It also features pulse-width-modulated (PWM) motion control, optical encoders with a resolution of 1024 pulse/revolution, which helps maintains highly accurate motion control, and a TeachPendant communication asset. The PWM and optimization techniques allow the unit to keep all motions within 0.001 inches repeatability. All internal drives, sensors, limit switches, and electrical systems are PLC and HMI controlled to ensure proper operation. ATM 105-1-2-S-RHS also features a vacuum chuck model for precisely positioning and loading wafers onto the unit. The unit includes a laser sensor and vision equipment that helps direct wafer orientation and updates the operator if a wafer is missed. Additionally, the unit is equipped with an interruption detection system to ensure wafer movement is consistent and an interrupted wafer is accurately re-oriented and back onto the path. BROOKS / PRI AUTOMATION ATM 105-1-2-S-RHS is an efficient and reliable wafer handler that is designed for advanced technology processing demands. Its advanced features and functions allow for improved operational efficiency and safety, while its sanitary design ensures a safe working environment. This wafer handler is the perfect choice for those looking for a reliable unit that can keep up with rapid production rates and help them stay ahead of the curve.