Used BROOKS / PRI AUTOMATION ATM-105-1-S-CE #9194553 for sale

BROOKS / PRI AUTOMATION ATM-105-1-S-CE is a multi-axis wafer handler designed to maximize the efficiency of wafer processing equipment. BROOKS ATM-105-1-S-CE is a high-performance wafer handler that is capable of scanning, slicing, and loading/unloading wafers with pinpoint accuracy and precision. This wafer handler offers repeatable step-and-repeat motion and the highest attainable throughput even with small, sophisticated wafers. PRI AUTOMATION ATM-105-1-S-CE is composed of 4 boards, including a control board, an I/O board, and an encoder board. The control board contains an IBM PC-based system with Microsoft Windows 95/98/00/NT operating system with a Stepper Motor Controller Card installed with accompanying software. The I/O board, which drives the stepper motor, is located at the edge of the electronics assembly. The encoder board receives pulses from the stepper motor, and the electronic components play a role in monitoring system temperature. The stepper motor and encoder boards are connected directly to the central processor (CPU) and memory. ATM-105-1-S-CE has multiple scanning and slicing capabilities, and an optimized OEM wafer-handling software package. The wafer handler features a patented "Smooth" scanning mode which provides repeatable and extremely accurate wafer slicing performance. It also supports multiple wafer size handling and slicing operations, which makes it ideal for a variety of wafer-based applications. The maximum manipulated wafer size is 8" diameter, but it can also handle larger wafers with the proper adapter installed. BROOKS / PRI AUTOMATION ATM-105-1-S-CE includes a standard number of features, such as electronic speeds, which help achieve a faster process yielding faster throughput. Its convenient sliding plates, along with the vacuum suction cups and the low-force gripper, allow for wafer loading and unloading without coming into contact with the active surfaces of the wafer. Furthermore, the recirculating ball screw allows smooth and gentle wafer movements which are critical for cleaning purposes. Finally, the wafer handler features an intuitive user interface with live graphics display. This user interface includes a programmable logic controller (PLC) to allow plant floor operation, and a number of communications ports are provided for attaching external devices or for linking to systems such as UPW plantwide monitoring systems. With its state-of-the-art motor controller design, BROOKS ATM-105-1-S-CE provides difficult-to-beat levels of wafer handling throughput and accuracy.