Used BROOKS / PRI AUTOMATION ATM-105-1-S-CE #9197649 for sale

BROOKS / PRI AUTOMATION ATM-105-1-S-CE wafer handler is a high-performance wafer handling equipment designed to provide superior yield and reliability through state-of-the-art, ultrafast motion capabilities. The machine is engineered for precise and repeatable wafer positioning, providing the optimum process stability and yields for semiconductor and wafer-level integrated circuit production. BROOKS ATM-105-1-S-CE is capable of handling up to 12-inch (300mm) wafers, making it highly suitable for high-volume production. It is equipped with an exceptionally fast motion system, which includes a high-speed, high-accuracy linear motor, a compact dual-axis servo motor and a proprietary ultrafast stepper motor, providing fast, repeatable and reliable nanometer-level positioning and repeatability. Additionally, the machine features a highly rigid, large profile gantry design, making it suitable for high-accuracy nanoprocessing. PRI AUTOMATION ATM-105-1-S-CE also incorporates a number of advanced features aimed to reduce cycle time and increase throughput. For instance, it utilizes Adaptive Recipe Learning (ARL) technology, which automatically learns optimal processing conditions for each individual wafer and generates the most efficient recipe based on the machine's real-time measurements. Additionally, the machine is equipped with Real-Time Tool Action Monitoring (RTM), a tool-centric monitoring unit which measures, records and reports the event-by-event operation of the chamber and its components. This ensures optimal operation and provides data for further analyses and further process optimization. ATM-105-1-S-CE also incorporates Multiple Chamber Loading/Unloading (MCLU), enabling continuous production of wafers with different process recipes. Additionally, it features a sophisticated user interface which provides programmable alarms, self-diagnostics and a warning machine. The tool also provides a range of safety features, such as a safety zone, laser sensors and an auto-abort cycle in order to maintain a safe production environment. Overall, BROOKS / PRI AUTOMATION ATM-105-1-S-CE wafer handler is a highly reliable, efficient and accurate wafer handling machine that offers the ultimate in process yields. It is ideal for high-volume wafer-level integrated circuit and semiconductor production and its advanced micro-positioning technology makes it suitable for nanoprocessing. Its extensive range of features and capabilities makes it a highly attractive and cost-effective asset.