Used BROOKS / PRI AUTOMATION ATM-105-1-S #293647986 for sale

BROOKS / PRI AUTOMATION ATM-105-1-S is a high performance wafer handler designed to meet the rigorous demands of semiconductor production operations. BROOKS ATM-105-1-S can handle up to 200mm diameter wafers in an 8-pocket cassette. The equipment utilizes a dual-arm gantry for high load capacity and precision motion, as well as a 0.2μ precision wafer aligner for accurate wafer loading and unloading. The system is a modular design, and includes motorized options such as terminal, conveyor, and vacuum sensing. PRI AUTOMATION ATM-105-1-S also includes industry-leading safety features, including two-dimensional barcode scanning, remote alarming, as well as clean wet and dry clean modes. ATM-105-1-S is controlled by a PC-based unit, which provides the user with superior control over process parameters and machine diagnostics. BROOKS / PRI AUTOMATION ATM-105-1-S features multiple tools for wafer mounting, including a pick and place tool which allows for rapid wafer placement; a wafer manipulator for precise gripping and positioning of wafers; and a vacuum chuck for vacuum-precision placement of a wafer. The asset also provides advanced motion control features which ensure accurate alignment, motion, and acceleration of the wafer load and unload operations. The integrated PC-based model provides remote control capability and the ability to monitor and control equipment status via the Ethernet port. BROOKS ATM-105-1-S provides a wide range of features to ensure process accuracy and repeatability, including high-resolution optical and laser alignment, in-line wafer scanning, and advanced vision sensors. The system also features a wide range of process control options, including robotic vision, job scheduling, wafer handling recipes, as well as wafer heating and temperature control systems. PRI AUTOMATION ATM-105-1-S unit also provides the flexibility to accommodate future automation and process requirements, providing users with the ability to easily upgrade, expand, and modify the machine. In conclusion, ATM-105-1-S is a high performance wafer handler used for semiconductor production operations, capable of providing superior precision, accuracy, and repeatability. The tool offers advanced features such as motion control, optical and laser alignment, in-line wafer scanning, and robotic vision, as well as process control for job scheduling, wafer heating, and temperature control. BROOKS / PRI AUTOMATION ATM-105-1-S is a modular design, and can be easily upgraded and modified in the future.