Used BROOKS / PRI AUTOMATION ATM 105-2-S #293647919 for sale

ID: 293647919
Robot.
BROOKS / PRI AUTOMATION ATM 105-2-S is an advanced wafer handler that combines state-of-the-art features with reliable, cost-effective performance. This wafer handler is designed to enable automated throughput of up to 15 wafers per hour, making it an ideal choice for high-throughput applications. The internal system is capable of handling up to 200mm wafers, meaning it can accommodate a wide variety of wafer sizes and types. BROOKS ATM 105-2-S is constructed with solid-state components that ensure a reliable, long-term performance with minimal downtime, even over extended periods of use. The system also features diagnostics capabilities and a four-way joystick/buttons control for manual operation, for added user convenience. The handler also includes a 4-inch control module that provides real-time information about wafer status, as well as other data, making the 105-2-S an ideal choice for manual or automated processes. In terms of safety and security, PRI AUTOMATION ATM 105-2-S is designed with an advanced safety control system that ensures process safety, while also providing control over the wafer handling process. The handler also employs a variety of sensors and detectors to pinpoint any irregularities and prevent potential damage to the wafers. For improved productivity, the handler employs a quick-change bushing feature which allows for rapid change out of wafers without the need for tool changeover, reducing cycle times. ATM 105-2-S is a highly advanced and reliable wafer handler that is suitable for a variety of applications. Its combination of features, robust construction, and safety features makes it an ideal choice for efficient and cost-effective throughput in high-throughput processes. The 105-2-S is a reliable and cost-effective choice for a wide range of wafer handling needs.
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