Used BROOKS / PRI AUTOMATION ATM-105 #293815417 for sale
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ID: 293815417
Vintage: 2003
Wafer robot
P/N: 6-0002-0324-SP
Equipped with a vacuum end effector
2003 vintage.
BROOKS / PRI AUTOMATION ATM-105 is a state-of-the-art wafer handler designed for semiconductor manufacturing facilities to automate the transportation and handling of silicon wafers throughout the production process. This advanced equipment offers high precision, reliability, and efficiency, ultimately contributing to increased productivity and yield in semiconductor fabs. At the core of BROOKS ATM-105 wafer handler is its sophisticated robotics system, which includes precision motors and sensors that enable highly accurate wafer manipulation and positioning. The unit is capable of handling wafers of various sizes and materials, ensuring compatibility with a wide range of semiconductor manufacturing processes. PRI AUTOMATION ATM 105 features a modular design, allowing for easy integration into existing wafer processing equipment, such as lithography, deposition, etching, and metrology tools. The robot arm of the wafer handler is equipped with multiple end-effectors tailored for specific wafer sizes and types, offering versatility and flexibility in wafer handling operations. One of the key highlights of PRI AUTOMATION ATM-105 wafer handler is its advanced automation capabilities. The machine is equipped with intelligent software and algorithms that enable autonomous operation, minimizing human intervention and reducing the risk of errors in wafer handling. The automation features of BROOKS / PRI AUTOMATION ATM 105 also contribute to improved overall equipment effectiveness (OEE) by optimizing cycle times and throughput. In addition to automation, BROOKS ATM 105 offers advanced wafer tracking and monitoring functionalities. The tool is equipped with sensors and cameras that provide real-time feedback on wafer positioning, orientation, and quality. This data is essential for process control and ensuring the integrity of semiconductor devices being manufactured. Another key aspect of ATM-105 is its industry-leading reliability and uptime. The asset is built with high-quality components and materials, ensuring robustness and longevity in demanding semiconductor manufacturing environments. Additionally, the wafer handler is designed for easy maintenance and servicing, reducing downtime and maximizing productivity. Furthermore, ATM 105 wafer handler incorporates advanced safety features to protect both the equipment and personnel in the fab. The model is equipped with sensors and interlocks that prevent collisions and mitigate potential hazards during operation. Additionally, BROOKS / PRI AUTOMATION ATM-105 adheres to industry standards and regulations for safety in semiconductor manufacturing facilities. Overall, BROOKS ATM-105 is a cutting-edge wafer handler that combines precision, automation, reliability, and safety to meet the evolving needs of semiconductor fabs. With its advanced robotics, intelligent software, and robust design, PRI AUTOMATION ATM 105 offers semiconductor manufacturers a competitive edge in wafer handling operations, ultimately leading to improved efficiency, yield, and quality in semiconductor production.
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