Used BROOKS / PRI AUTOMATION ATM-105 #9064558 for sale

BROOKS / PRI AUTOMATION ATM-105 is a high performance wafer handler designed for advanced automation solutions in semiconductor production. This tool provides a fully integrated platform for transferring wafers between process tools and trays with precise accuracy and control. This tool is based on a compact, modular design, allowing for easy installation and maintenance. BROOKS ATM-105's main frame is built from a rigid aluminum sheetmetal framework, providing an extremely sturdy structure for even higher throughput requirements. The high accuracy vacuum-based wafer handling equipment includes a dual-rail vacuum based shuttle and wafer chucks for reliable gripper operations. An advanced autoleveling feature compensates for all deviations in the vacuum-based transfer rail system, ensuring accurate wafer handling with no manual adjustment needed. A high-speed motor-driven rotary actuator ensures smooth, precise rotations, while a precision linear actuator enables ultra-fast, smooth indexing of wafers. PRI AUTOMATION ATM 105 is also designed with an advanced single-handed robotic arm that allows for fast, seamless transfers of wafers between process tools and tray carriers. The combination of this robotic arm and vacuum-based wafer handling unit also allows for fast, consistent loading and unloading of wafers to and from trays. Additionally, an advanced vision guidance machine enables PRI AUTOMATION ATM-105 to precisely align wafers and trays, ensuring accuracy and repeatability. ATM 105 also features a powerful control tool including a user-friendly graphical user interface (GUI). This control asset enables remote, direct control of all functions, providing precise control and detailed process monitoring. The GUI also provides the user with real-time visualization of the wafer handler environment, allowing operators to easily view current data and process information. In short, BROOKS ATM 105 wafer handler is a powerful and precise tool that provides high performance wafer handling solutions for advanced automation in semiconductor production. With its high accuracy, precision, and user-friendly interface, ATM-105 is an ideal choice for automation solutions in today's semiconductor manufacturing.