Used BROOKS / PRI AUTOMATION ATM-105 #99632 for sale

BROOKS / PRI AUTOMATION ATM-105 is a wafer handler designed for mid-range wafer fabrication applications, such as CMP, CVD and Etch. BROOKS ATM-105 is a modular equipment, designed for flexibility in order to accommodate a wide range of substrates and processes. It features a high-speed flat plane 'in-line' transport system which provides exact control of the wafer carrier motion, accurate measurement of position and speed as well as stable, reliable, constant and repeatable accuracy. PRI AUTOMATION ATM 105 also provides total equipment control with its standard LNC-1000 and communications package. This package includes the ability to define equipment parameters and processing recipes that can be used to quickly set up any process step. BROOKS ATM 105 incorporates an improved wafer handling mechanism which minimizes wafer dicing during handling. ATM 105 has easy to service pneumatics, electrical and mechanical components, which allow for easy maintenance, enabling quick response and reduced downtime. BROOKS / PRI AUTOMATION ATM 105 automatically calibrates each cassette as it is installed into the unit and quickly recognizes when a different cassette was installed, ensuring accurate, repeatable wafer tracking and transfer. More accuracy can be achieved by connecting a high-accuracy inspection camera for wafer orientation. PRI AUTOMATION ATM-105 is capable of automatic feature identification, enabling it to make advanced decisions on which routes to take for each wafer surface. The machine improves throughput and reduces non-value-added operations by performing real-time alignment and inspection of wafer features. ATM-105 can process wafers up to 8" in diameter with a personal computer controlled interface, providing user-friendly operation. The tool also provides an Ethernet interface for remote access to equipment, operators, and process management systems. BROOKS / PRI AUTOMATION ATM-105 is a reliable, efficient and safe asset, that can be used in any number of process and production environments. Its high-level control and accuracy makes it an ideal solution for mid-range wafer fabrication processes