Used BROOKS / PRI AUTOMATION ATM-107 #132338 for sale

BROOKS / PRI AUTOMATION ATM-107
ID: 132338
Wafer Size: 8", 12"
Robot, 8" and 12".
BROOKS / PRI AUTOMATION ATM-107 is an advanced wafer handling equipment designed for precision operation. It features a state-of-the-art wafer magazine, a high-performance robot, and an optically-based precision alignment system. With its advanced technology and intuitive controls, BROOKS ATM-107 is capable of precisely transferring and aligning wafers of various sizes and densities with great accuracy and speed. The wafer magazine featured with PRI AUTOMATION ATM 107 is designed to hold and protect up to one hundred wafers in a single cassette. It is equipped with a high capacity auto-loader and a choice of mechanical, optical, or capacitive detection systems to precisely identify and select the correct wafer. The magazine's advanced design ensures that the entire magazine is heated evenly, minimizing thermal shock and maintaining consistent temperatures throughout. ATM 107 also features an advanced five-axis articulated robot with a high speed 40-watt, brushless DC servomotor. The robot is capable of accurately positioning and orienting wafers with great precision and reliability. The robot is also fitted with an advanced vision unit that uses laser triangulation and tracking algorithms to accurately align wafers to their exact location. Finally, PRI AUTOMATION ATM-107 is equipped with an optical-based precision alignment machine which uses a combination of image-based pattern matching and fiduciary marks to accurately identify the correct alignment points. This advanced tool is designed to quickly and accurately align wafers to their exact location and orientation, resulting in even and reliable wafer transfer. Overall, BROOKS / PRI AUTOMATION ATM 107 is an advanced wafer handling asset designed to provide users with a reliable and highly precise wafer handling experience. With its advanced wafer magazine, high performance robot, and optically-based precision alignment model, ATM-107 can ensure precision, repeatability, and cost-efficiency in any industrial application.
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