Used BROOKS / PRI AUTOMATION ATM-305-1 #9211142 for sale

BROOKS / PRI AUTOMATION ATM-305-1 Wafer Handler is a well-designed and reliable automation device designed for working with thin and sensitive wafers such as those used in semiconductor manufacturing. BROOKS ATM-305-1 is a two-axis wafer handler featuring air bearings on both the X and Y axes. This provides superior low-friction movement and excellent positional accuracy, allowing it to handle wafers up to 6 inches in diameter with a maximum of 50 microns of total error. PRI AUTOMATION ATM-305-1 is equipped with a three-axis optical detection system for accurately setting up the wafer in a precise position. Once the wafer is precisely aligned, the handler can move it with short, high-accuracy steps, ensuring that each wafer is accurately positioned during handling operations. This is particularly useful for working with ultra-thin wafers, since accurate positioning is critical for working with these delicate materials. ATM-305-1 is also equipped with a set of drive motors, including two very-high-torque stepper motors, providing a stable, repeatable force that allows it to move wafers safely and accurately. There are also a number of safety features included, such as control sensors, redundant safeties, and optional ionized air blow-off. This ensures that the wafer is handled safely and securely and reduces the risk of wafer damage. In addition, BROOKS / PRI AUTOMATION ATM-305-1 offers a range of maintenance and support features. This includes remote diagnostics and control, which allows operators to check on the condition of the handler from a PC or mobile device. In addition, the system also offers a range of spare parts and components, allowing operators to perform their own repairs and replacements. Overall, BROOKS ATM-305-1 wafer handler is an excellent choice for working with sensitive wafers, thanks to its highly accurate and reliable motion control, safety features, and maintenance and support features. With this system, a reliable and accurate production process can be achieved, ensuring that each wafer is processed with minimal errors or damage.