Used BROOKS / PRI AUTOMATION ATM-305-1 #9211145 for sale

BROOKS / PRI AUTOMATION ATM-305-1 is a state-of-the-art wafer handler designed for high-volume processes. The automated wafer handler can accommodate wafer sizes up to 200 mm and allows for wafer-to-wafer matching and stacking. Its high speed enables up to 300 wafers to be processed per hour, with a maximum of 60 wafers at a time. The equipment can also accept wafers from seven different sources and can transfer wafers to three different parts of the system. BROOKS ATM-305-1 has several features that make it a top-of-the-line wafer handler. It is designed for reliability and low maintenance, and has a large number of sensors built in to monitor operation and longevity of the equipment. Its modular design helps to ensure easy servicing of components. Furthermore, the unit is designed for high accuracy and repeatability, with ±1 μm of accuracy in positioning the wafers. PRI AUTOMATION ATM-305-1 also has many safety features. It is designed with both door interlocks and E-Stops, to ensure operators are not endangered and the machine is quickly shut off in case of an emergency. It also has an air shower to help protect wafers from contamination. Furthermore, a shower feature helps to remove particles from wafers during transfer. The tool also includes suction features to help with handling and transfer of wafers. ATM-305-1 is an excellent choice for processing wafers in volume. Its robust design, safety features, high accuracy, and flexibility make it a great solution for a wide variety of high-volume processes. Its E-Stops and other safety features make it a safe choice as well. BROOKS / PRI AUTOMATION ATM-305-1's modular design also ensures long-term operational reliability with minimal maintenance. All in all, BROOKS ATM-305-1 is an excellent choice for high-volume wafer processing.